JPH0256604B2 - - Google Patents

Info

Publication number
JPH0256604B2
JPH0256604B2 JP18976182A JP18976182A JPH0256604B2 JP H0256604 B2 JPH0256604 B2 JP H0256604B2 JP 18976182 A JP18976182 A JP 18976182A JP 18976182 A JP18976182 A JP 18976182A JP H0256604 B2 JPH0256604 B2 JP H0256604B2
Authority
JP
Japan
Prior art keywords
light
objective lens
irradiated
optical device
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18976182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5979104A (ja
Inventor
Keiichi Yoshizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57189761A priority Critical patent/JPS5979104A/ja
Publication of JPS5979104A publication Critical patent/JPS5979104A/ja
Publication of JPH0256604B2 publication Critical patent/JPH0256604B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP57189761A 1982-10-27 1982-10-27 光学装置 Granted JPS5979104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57189761A JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189761A JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Publications (2)

Publication Number Publication Date
JPS5979104A JPS5979104A (ja) 1984-05-08
JPH0256604B2 true JPH0256604B2 (en]) 1990-11-30

Family

ID=16246731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189761A Granted JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Country Status (1)

Country Link
JP (1) JPS5979104A (en])

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169706A (ja) * 1984-02-14 1985-09-03 Olympus Optical Co Ltd 表面形状測定装置
JPH044166Y2 (en]) * 1984-11-06 1992-02-07
JPS629211A (ja) * 1985-07-05 1987-01-17 Matsushita Electric Ind Co Ltd 光学測定装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS62238403A (ja) * 1986-04-09 1987-10-19 Mitsubishi Electric Corp 表面形状測定装置
JPS63275323A (ja) * 1987-05-08 1988-11-14 Hamamatsu Photonics Kk 診断装置
JP2748702B2 (ja) * 1991-02-04 1998-05-13 松下電器産業株式会社 三次元測定機の誤差補正方法
JPH05172738A (ja) * 1991-12-24 1993-07-09 Jasco Corp 音響セル
US5488230A (en) * 1992-07-15 1996-01-30 Nikon Corporation Double-beam light source apparatus, position detecting apparatus and aligning apparatus
WO2016050453A1 (en) * 2014-10-03 2016-04-07 Asml Netherlands B.V. Focus monitoring arrangement and inspection apparatus including such an arragnement

Also Published As

Publication number Publication date
JPS5979104A (ja) 1984-05-08

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